EQUIPMENT | 実験装置
 |
 |
 |
||
|---|---|---|---|---|
| Experimental Room (5-653/16-329) | Preparation Room (5-651) | Clean Room (Build #16) |
Characterization | 評価機器
 |
 |
 |
||
|---|---|---|---|---|
| Vacuum Prober (5-653) | Flexible Prober (5-653) | Manual Prober (5-653) | ||
 |
 |
 |
||
| Semiconductor Parameter Analyzer (5-653) | Precision Measurement Unit (5-653) | Optical Microscope (5-653) | ||
 |
 |
 |
||
| UV-Vis Spectrophotometer (5-653) | Ellipsometer (16-329) | Oscilloscope, Digital Multimeter, etc. (5-653) | ||
 |
 |
 |
||
| Laser Microscope (shared, CR) | Dektak XT (shared, CR) | Scanning Electron Microscope (shared, CR) | ||
 |
 |
 |
||
| X-ray Diffractometer (shared, 230) | Raman Microscope (shared, 231) | Flexible film measurement system (5-653) |
Fabrication | 作製機器
 |
 |
 |
||
|---|---|---|---|---|
| Robotic Micro Dispensing System (16-329) | Rapid Thermal Annealer (5-653) | Quick Coater (16-329) | ||
 |
 |
 |
||
| Spin Coater (5-653) | Hot Plate, Furnace, etc. (5-653) | Fume Hood (5-653) | ||
 |
 |
 |
||
| Nanoimprint Lithography System (16-326) | Sputtering System (shared, CR) | Vacuum Evaporator (shared, CR) | ||
 |
 |
 |
||
| Mask Aligner (shared, CR) | Dicing Saw (shared, CR) | Reactive Ion Etching System (shared, CR) |
